Film

Organic or Metal

Composite

Polymer

Processes on substrate

Adsorption, desorption, migration, aggregation, crystallisation

+

Adsorption, desorption chemisorption,migration, polymerisation, crystallisation, supermolecular structure growth

Surfacetreatment decomposition Nucleation centers

Gas phase

Me or monomer

Monomer, active and passive fragments

Activation

pulsed discharge

LF, RF, MW

Treatment by e-beam

Evaporation

Decomposition

Compound

Saturated

unsaturated

Complex compound with weakest bond

Polymer

Energy introduction

Thermal contact heating

Volume laser radiation absorption

Electron beam thermal

Ion beam sputtering

Physical processesChemical processes

Film deposition processes Scheme should be considered from bottom to top