NCXY Series High-Accuracy Multi Dimensional Stages

Built-in high accuracy capacitance sensors. Accurate parallel motion with high dynamical performance up to 200um x 200um motion range. Technical Data

Model NCXY-100 NCXY-200 Motion 100 um 200 um Sensor Type Capacitance Capacitance Non Linearity < 0.02% < 0.03% Resolution 0.3 nm 0.6 nm Repeatability +/- 1nm +/-2nm Resonant Frequency 600Hz 600Hz Voltage -10...+150V -10...+150V Max Force 200 N 200 N Stiffness 3 N/um 3 N//um Dimensions(L x W x H) 100 x 100 x 25 mm 100 x 100 x 25 mm

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