 |  |  |  |  |
motion with high dynamical
performance up to 500um x 500um
motion range, low-profile (20mm in
height.)
Technical Data
| Model |
NLXY-200 |
NLXY-500 |
| Motion |
200 um |
500 um |
| Sensor Type |
VLDT |
VLDT |
| Non Linearity |
< 0.05% |
< 0.05% |
| Resolution |
2 nm |
5 nm |
| Repeatability |
+/- 5nm |
+/-10nm |
| Resonant Frequency |
500Hz |
500Hz |
| Voltage |
-10...+150V |
-10...+150V |
| Max Force |
200 N |
200 N |
| Stiffness |
2 N/um |
2 N//um |
| Dimensions(L x W x H) |
120 x 120 x 20 mm |
120 x 120 x 20 mm |
