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very high accuracy nanometer and
sub-nanometer scanning and
positioning purposes. It has a
built-in capacitance sensor. Use this
actuator with nDimension Tech's
high resolution digital feedback
controller, 0.1 nanometer accuracy
can be achieved. The step response
is as fast as 0.5 ms without any
lower frequency side oscillations to
affect the positioning performance.
Technical Data
| Model |
NSZ-20 |
| Motion |
20 um |
| Accuracy |
0.1 nm |
| Resonant Frequency |
6 KHz |
| Non Linearity |
< 0.02% |
| Voltage |
-10...+150V |
| Max Force |
800 N |
| Stiffness |
20 N/um |
| Length |
44 mm |
| Diameter |
20.5 mm |
| Sensor Type |
Capacitance |
actuator with setting time of 0.5ms.
