Equipment

1. Two vacuum installations VUP-5M  (made in Ukraine) with devices:

1.1) electron gun evaporator            1.2) thermal boat evaporator
1.3) plasma discharge unit                   1.4) sputtering unit
1.5) substrate heating and rotating    1.6) substrate cooling by liquid N2
1.7) laser interference control          1.8) optical absorption etc.
1.9) quartz crystal microbalances     2.0)  40,68 MHz generator 20 - 70 W.

Computerised systems for co-deposition. Scheme of Installation.
Thermal and e-gun evaporators  work simultaneously with control by quartz monitors with feedback to power supply. 
Polytec spectrometers for spectra recording during film growth (400 - 800 nm). Thanks to  DAAD for spectrometers. 

Sublimator and Pyrolyzer for DPX to deposit PPX film.
Installation allows us to deposit PTFE (n=1,35-1,4), PPS and PPX  (n=1,6-1,7) doped with dye and metal at any ratio.

Industrial installation UVN -74 with chamber diameter 0,5 m. Equipped with:
Thermal and e-gun evaporators.
StellarNet optical spectrometer for 200-1100 nm in situ  measurements.
Sigma SQM-242 Co-Deposition Controller: 3 channels.
Dressler Cesar 40,68 MHz generator 0 - 300 W.
Spectrometers: Specord-M40 and -M80 for UV-VIS and IRs, SDL-2 for photoluminescence. LEF-3M ellipsometer (632 nm). 
 AFM  NanoScope IIIa Dimension 3000TM  for nano-litography and film  relief etc. studies.  
 JEM - 100EX  for TEM and ED studies.

Vacuum installation in Wildau equipped with thermal and e-beam evaporators, Sigma SQM-242 Co-Deposition Controller. 
0 - 1 GHz generator 0 - 1500 W, Optical absorption spectrometer in situ.