Scheme of installation

1 – vacuum chamber, 2 – substrates, 3 – system and 4 – motor for substrate rotation, 5 – shutter, 6 – evaporator-activator of PTFE,
7 – Au evaporator,  8 – RF electrodes,  9 – quartz crystals,  10 – fibres,  11, 15, 16, 17 – controllers of quartz monitors, motor, PTFE and Au evaporators,  12 – RF generator, 13 – computer, 14 – Spectrometer Polytec,  18 – digital-to-analogue and analogue-to-digital converters.
 19. DPX pyrolyser  with multi-zone furnace. (Download its scheme in pdf).