Silicon Designs, Inc.

Model 1010

DIGITAL ACCELEROMETER

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CAPACITIVE SENSOR
DIGITAL OUTPUT
WIDE TEMPERATURE RANGE
SURFACE MOUNT PACKAGE

FEATURES

Digital Pulse Density Output

Low Power Consumption

-55 to +125 °C Operation

Built-in Nitrogen Damping

TTL/CMOS Compatible

+5 VDC Power

No External Reference Voltage

Easy Interface to Microprocessors

Good EMI Resistance

Responds to DC & AC Acceleration

Non Standard G Ranges Available
Hermetic LCC or J-Lead Surface Mount Package

DESCRIPTION

The Model 1010 accelerometer is a low-cost, integrated accelerometer for use in zero to medium frequency instrumentation applications.  It combines a micromachined capacitive sense element and a custom integrated circuit that includes a sense amplifier and a sigma-delta A/D converter in a single, miniature, hermetically sealed package.  It is relatively insensitive to temperature changes and gradients and each device is marked with a serial number on its bottom surface for traceability.

ORDERING INFORMATION

Full Scale
Acceleration

Hermetic Packages

20 pin LCC

20 pin JLCC

±5 G

1010L-005

1010J-005

±10 G

1010L-010

1010J-010

±25 G

1010L-025

1010J-025

±50 G

1010L-050

1010J-050

±100 G

1010L-100

1010J-100

±200 G

1010L-200

1010J-200

OPERATION

The Model 1010 accelerometer produces a digital pulse train in which the density of pulses (number of pulses per second) is proportional to applied acceleration. It operates with a single +5 volt power supply and requires a clock of 100kHz-1MHz. The output is ratiometric to the clock frequency and independent of the power supply voltage. Two forms of digital signals are provided for direct interfacing to a microprocessor or counter. The sensitive axis is perpendicular to the bottom of the package, with positive acceleration defined as a force pushing on the bottom of the package. External digital line drivers can be used to drive long cables or when operated in an electrically noisy environment.

SIGNAL DESCRIPTIONS

VDD & GND (Power): Pin 14 (VDD) & pin 19 (GND). Additionally tie pins 3 & 11 to VDD & pins 2, 5, 6, & 18 to GND.

CLK (Input): Pin 8. Reference clock input. The hysteresis threshold input must be driven by a 50% duty cycle square wave signal. All 1010 series accelerometers are calibrated at 250 kHz which is the recommended clock frequency for best results. Operation at frequencies as low as 100 kHz or as high as 1MHz are possible, however a slight bias calibration shift may result.

CNT (Output): Pin 10. Count output. A return-to-zero type digital pulse stream whose pulse width is equal to the input CLK logic high time. The CNT pulse rate increases with positive acceleration. The device experiences positive (+1g) acceleration with its lid facing up in the earth's gravitational field. This signal is meant to drive an up-counter directly.

DIR and DIR(not) (Output): Pins 12 and 16 respectively. Direction output. This output is updated at the fall of each clock cycle. It is high during clock cycles when a high going CNT pulse is present and low during cycles when no CNT pulse is present. A non-return-to-zero signal meant to control the count direction (i.e. up or down) of a counter. DIR can be low pass filtered to produce an analog measure of the acceleration. DIR(not) is the compliment of DIR and is provided for use in driving differential transmission lines.

DV (Input): Pin 4. Deflection Voltage. Normally left open. A test input that applies an electrostatic force to the sense element, simulating a positive acceleration without application of an accelerative force.

VR (Input): Pin 3. Voltage Reference. Tie to same voltage as VDD or to a filtered version of +5V for better noise immunity. A 0.1uF bypass capacitor is recommended at this pin.

CLK/2 (Output): Pin 15. Clock divided by 2. A buffered clock output whose frequency equals CLK divided by 2.


PERFORMANCE by Model:  VDD=5.0VDC, TC=25 °C.

Model Number

1010x-005

1010x-010

1010x-025

1010x-050

1010x-100

1010x-200

Units

Input Range

±5

±10

±25

±50

±100

±200

G

Frequency Response (Nominal, 3 dB)

0 - 600

0 - 1000

0 - 1600

0 - 2000

0 - 2500

0 - 2500

Hz

Sensitivity (FCLK=1MHz)

0.01

0.02

0.05

0.10

0.20

0.40

mG/pulse/sec

Max. Mechanical Shock (0.1 ms)

2000

G

PERFORMANCE - All Models:  Unless otherwise specified VDD=5.0VDC, FCLK=250kHz, TC=25 °C.

Parameter

Min

Typ

Max

Units

Cross Axis Sensitivity

 

2

3

%

Bias Calibration Error 1

 

1

2

% of FCLK (span)

Bias Temperature Shift (TC=-55 to +125°C) 1

 

100

300

(ppm of FCLK)/°C

Scale Factor Calibration Error1,2

 

1

2

%

Scale Factor Temp. Shift (TC=-55 to +125 °C) 1

 

+300

 

ppm/°C

Non-Linearity (-90% to +90% of Full Scale) 1,2

 

0.5

1.0

% of span

Power Supply Rejection Ratio (VDD tied to VR)

40

 

 

dB

Operating Voltage

4.5

5.0

5.5

V

Operating Current (IDD + IVR) 1

 

2.0

3.0

mA

Clock Input Voltage Range (with respect to GND)

-0.5

 

VDD+0.5

V