0%

Pre–OHMIC Over–Etch

50%

100Å

500Å

18.25 V

18.25 V

2.78V

11.59V

13.29 V

16.91 V

15.31 V

MultipleInputVariables:
1.ExperimentalDesign(Screening)
A.Full factorial
B.Fractional factorial
C.Factorial w/centerpoint

2.

Response Surface Modeling (Visualization)

A.

Box-Behnken Designs

B.

Central Composite Designs

C.

Multiple linear regression

D.

Stepwise regression

E.

Contour Plots

F.

Mesh Plots

3.

Predicting Response Distribution
A.MonteCarlo simulation
B.Generation ofSystem Moments
Prioritizing Input Variables
Optimization
A.YieldSurfaceModelingTM

4.
5.