el
e Dose
e Energy
e anneal
tched

-2
9.10
123
13
50

-1
9.9
130
20
100

0
11
140
30
150

+1
12.1
150
40
200

+2
12.8
167
47
250

RUN
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17

X1
BASE DOSE
-
+
-
+
-
+
-
+
2
-2
0
0
0
0
0
0
0

X2
BASE ENERGY
-
-
+
+
-
-
+
+
0
0
2
-2
0
0
0
0
0

X3
BASEFOR
ANNEAL TIME
-
-
-
-
+
+
+
+
0
0
0
0
2
-2
0
0
0

X4= X1•X2•X3
SI ETCHED
-
+
+
-
+
-
-
+
0
0
0
0
0
0
2
-2
0

Hfe
114
106
71
52
129
86
63
56
64
96
42
138
76
78
86
69
77

Multiple Input Variables:

1.

ExperimentalDesign (Screening)
A.Full factorial
B.Fractional factorial
C.Factorial w/centerpoint
Response SurfaceModeling(Visualization)
A.Box-BehnkenDesigns
B.Central Composite Designs
C.Multiplelinearregression
D.Stepwise regression
E.Contour Plots
F.MeshPlots

2.

3.

Predicting Response Distribution

A.

Monte Carlo simulation

B.

Generation of System Moments

4.

Prioritizing

Input Variables

5.

Optimization

A.

Yield Surface ModelingTM